Products
Complete Plasma Monitoring
ProPak is the first real-time, plasma monitoring system. While other systems simply call endpoint, ProPak offers more robust endpoint calls with full-spectrum optical emission spectroscopy (OES), plus real-time fault detection and chamber State of Health. In addition to being the most advanced plasma monitoring tool on the market, ProPak is also capable of simultaneously examining optical emissions on multiple reactor chambers for a single cluster tool.
Advanced Endpoint
Our superior endpoint capability is a direct result of ProPaks proprietary hardware and software components. ProPak takes full advantage of its optical observations, monitoring multiple bandpass regions, not just a single wavelength as is common with other tools. The fiber optic bundles and viewport mounts are constructed specifically for the ultraviolet to near infrared region of the spectrum in order to optimize the amount of light transmitted to the solid state spectrometers.
Through competing endpoint detection methods, ProPak's software increases the accuracy and reliability of endpoint calls by utilizing multiple regions within the full spectrum data set.
Faults Detected and Communicated
ProPak further analyzes its high-resolution optical data in order to react to chemistry-based plasma faults as they occur. When a known fault is detected, real-time alarms are displayed, and fault flags are sent out over the Fabs network to alert all necessary personnel to the condition. Using ProPak's archived data sets, previously unknown faults can be quantified and acted upon.
State of Health Analysis
Statistical analysis of historical data sets allows the Process Engineer to determine chamber State of Health. By monitoring day-to-day variations in endpoint time, chamber conditions can be closely correlated with minute changes in plasma chemistry, deviations in wafer composition, and other optically detectable plasma variations
Complete Process Monitoring and Control
ProPak offers the semiconductor device manufacturing industry reliability, versatility, and increased productivity through patented hardware and software. Peak Sensor Systems assists customers in using this plasma monitoring system to its fullest extent by offering unparalleled customer service and support.
PlasmaTrak
Identify Chamber, Plasma and Wafer Faults at a glance…(more)