Application Notes

To read a brief synopsis of the application notes we have available, please click on the links below. If, after reading the synopsis, you wish to request the full document, simply click on the download link and fill out the request form.* A full-length copy will be sent to your e-mail address.

Application Note: 111
Endpointing the Via Oxide Etch on the TEL Unity DRM Using OES

Application Note: 112
Endpointing the CHF3/CF4/Ar Plasma Oxide Etch with Spectral Analysis

Application Note: 113
CHF3/CF4/Ar Plasma Oxide & Nitride Etch with Spectral & Chemical Analysis

Application Note: 114
OES Interferometric Effects During Plasma Etching

Application Note: 115
Photoresist Ashing Endpoint by Optical Emission Spectroscopy (OES)

Application Note: 116
Endpointing NF3 Chamber Clean by OES before a Trench Etch

Application Note: 117

Endpointing NF3 Chamber Clean by Optical Emission Spectroscopy

*You are under no obligation and no salesperson will contact you unless you wish it. We do not sell or trade any information we receive.